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NCKU Chair Prof. awarded for dual-phase virtual metrology method and its industrial applications
NCKU Press Center
[Tainan, Taiwan, 9 Jan. 2012]
 Chair Prof. Fan-Tien Cheng of the Institute of Manufacturing Information and Systems at National Cheng Kung University (NCKU), Tainan, Taiwan, won the 2011Award for Outstanding Contributions in Science and Technology bestowed by the Executive Yuan of Taiwan.
The dual-phase virtual metrology (VM) method that won Cheng the award emphasizes promptness in Phase-I conjecture step and intensifies accuracy in Phase-II conjecture step. In this scheme, the accompanying reliance index (RI) and global similarity index (GSI) of each VMI and VMII are also generated to gauge the degree of reliance. This scheme has been widely applied to the wafer-to-wafer or glass-to-glass advanced process control for semiconductor or TFT-LCD factories.
President Hwung-Hweng Hwung of NCKU congratulated Cheng on his reception of the honor, saying that as himself a recipient of the same award in 2006, he knew how prestigious it was, because winning the award means one is recognized not only for his outstanding research but also for his contributions to industry by significant patents and technology transfers.
Prof. Cheng expressed, “Persistence is my motto. Once you start a task, you don’t stop until it is completed. ” I do the best to put theory into practice, to ensure that when it’s realized it’ll benefit the society, Cheng added.
Cheng held various administrative and academic positions, including the Director of the Institute of Manufacturing Engineering at NCKU, the Associate Editor IEEE Transactions on Robotics and Automation, the Chairman IEEE Robotics and Automation Society of Taipei Chapter, the Distinguished Professor of the Institute of Manufacturing Engineering at NCKU, the Convener and Director of Automation Engineering Program at National Science Council, the Secretary General of Chinese Institute of Automation Engineers, and is currently Chair Prof. of Institute of Manufacturing Information and Systems at NCKU.
The Award for Outstanding Contributions in Science and Technology of the Executive Yuan is given to scientists in recognition of their contribution to society and the country. For the 2011 award, seven recipients of four project cases were selected among forty project cases. As one of the seven recipients of the award, Fan-Tien Cheng was presented a winning cup and a prize of NT$1,000,000 by Chun Chen, Vice Premier of the Executive Yuan on 28 Dec. 2011.
In addition to Cheng, other recipients included Mei-Shang Ho of Academia Sinica, Jia-Horng Kao of National Taiwan University, and Shyh-Jiann Hwang and his team of National Center for Research on Earthquake Engineering.
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