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Coupled waveguide-surface plasmon resonance
biosensor with subwavelength grating Shean-Jen Chen Department of Engineering Science, National Cheng
Kung University, Tainan 701, Taiwan
The article is extracted
from: F.-C. Chien, C.-Y. Lin, J.-N. Yih, K.-L. Lee, C.-W. Chang,
P.-K. Wei, C.-C. Sun, and S.-J. Chen, “Coupled waveguide-surface
plasmon resonance biosensors constructed with sub-wavelength
gratings,” Biosensors & Bioelectronics, vol. 22, no. 11, pp.
2737-2742, May 2007.
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Optical sensing approach generally involves some form of
fluorescence/radioactive labeling. This additional step not only
increases the time and cost of the procedure, but also increases its
complexity and potentially interferes with the molecular interaction
by occluding binding sites or inducing conformational changes of the
samples, hence leading to false negatives. Therefore, various
label-free methodologies have been presented to perform biomolecular
interaction analysis (BIA). Surface plasmons (SPs) are oscillations
of the free electrons located on the surface of metals. When the
phase velocity of an incident evanescent transverse magnetic (TM)
light wave matches that of the SPs, the so-called surface plasmon
resonance (SPR) phenomenon occurs, and virtually all of the incident
photon energy is transferred to the SPs. SPR biosensors based on the
Kretschmann configuration, which uses the attenuation total
reflection (ATR) prism coupler method to excite the SPs, provide a
better detection limit than other conventional methods. However, the
Kretschmann configuration has a number of drawbacks, including the
need for a highly sophisticated and precise metrology system and the
requirement for a matching-index oil to couple the incident light
from the prism into the metal surface on which the biomolecular
interactions take place. Therefore, a coupled waveguide-surface
plasmon resonance (CWSPR) biosensor developed in this study provides
a highly sensitive and accurate detection performance. Furthermore,
its simple optical setup enables the kinetics of biomolecular
interactions on the sensing surface to be analyzed on an on-line
basis without the need for prism coupling compared to that of a
CWSPR device based on the Kretschmann configuration.
incident
TM mode white light as its propagation constant, , is near zero and lower than that of SPs, ksp:
(1)
where λ is the
wavelength of the incident light and θ the incidence angle is zero
for a normally incident light. However, the propagation constant of
the incident light parallel to the grating surface is altered as
follows:
 ,
(2)
where m is the
diffraction order and Λ is the diffraction grating period. As
follows from Eq. (2), the new propagation constant of the normally
incident diffraction white light (θ = 0) with a subwavelength
grating at m = 1 can be enhanced to match the real part of the
propagation constant of SPs as Eq. (1) at a specific wavelength. In
analyzing subwavelength diffraction gratings, researchers have
generally employed rigorous diffraction theory (rigorous coupled
wave analysis, RCWA) or effective medium theory. In RCWA, the
electric field in the periodic structure is expanded as the linear
combination of the spatial harmonics. Meanwhile, in the modal
method, the electric field in the diffraction grating is expanded as
the combination of the modes which individually satisfy the
waveguide wave equation and are permitted to be expanded by the
infinite spatial harmonics.

Fig. 2. Reflectivity spectra of plasmonic grating
biosensor with normal incident white beam. Solid line: TM
polarization with waveguide layer, Dashed line: TM polarization
without waveguide layer, Dash-dot line: TE polarization with
waveguide layer, Dotted line: TE polarization without waveguide
layer.
Fig. 1. Schematic of coupled waveguide–surface plasmon
resonance biosensor with subwavelength grating structure.
Fig. 1 presents a
schematic illustration of the current CWSPR biosensor with a
subwavelength grating structure. Fig. 2 compares the reflectivity
spectrum of the proposed CWSPR biosensor with that of a biosensor
with a similar configuration but with no waveguide layer.
Fabrication of the current biosensor commenced by spinning a resist
layer of polymethyl methacrylate (PMMA, MicroChem Corp.) onto a
Pyrex plate of thickness 1 mm. A uni-dimensional diffraction grating
measuring 100 100 μm2 was then patterned using a scanning electron
microscope (SEM) equipped with a lithography system. The pattern was
developed using a solution of isopropyl alcohol (IPA, Merck) and
iso-butyl methyl ketone (MIBK, Merck). Subsequently, a layer of
nickel was evaporated and then lifted off to create an etching mask.
An anisotropic reactive ion etching process using a fluorine ion
base was used to etch a subwavelength grating with a depth of 35 nm.
The nickel mask was removed and a radio frequency sputtering process
was used to deposit a Ta2O5 waveguide layer of thickness 285 nm and
then a gold film of thickness 40 nm. The following reagents were
used in the current experiments: carboxyl-terminated
16-Mercaptohexadecanoic acid (MHDA, Aldrich),
N-Ethyl-N-(3-dimethylaminopropyl) carbodiimide hydrochloride (EDC
hydrochloride, C8H17N3•HCl, M.W. = 191.70 g/mole, Fluka),
N-Hydroxysuccinimide (NHS, C4H5NO3, Mw = 115.09 g/mole,
Fluka), 0.5 μΜ protein G (from Streptococcus Sp., Mw = 22,600
g/mole, Sigma) dissolved into a 10 mM Tris-HCl buffer solution (pH
7.6, and 150 mM NaCl), and 1.0 μΜ anti-albumin antibody (from goat,
Sigma). The surface was rinsed in deionized water, cleaned with
ethanol, and dried in pure nitrogen gas. The biochip was then soaked
in a 1 mM MHDA ethanol solution for 6 hours. After being soaked, the
biochip was once again rinsed, cleaned and dried using deionized
water, ethanol, and nitrogen, respectively, and then soaked in a 2
mM EDC 5 mM NHS solution for 12 h.

Fig. 4. Dynamic response of CWSPR during antibody
interaction with protein on sensing surface.
Fig. 3. Schematic illustration of normal incident
spectroscope.
In the current
optical metrology system, a white light emitted from a single mode
optical fiber is collimated into the microscope objective lens (4 ,
NA = 0.1) and focused on the sensing surface with a spot size of
less than 100 μm. (See Fig. 3.) During the current molecular
interaction detection processes, the specimens were pumped at a
constant flow rate of 85 μl/min into a reaction cell maintained at a
temperature of 27±0.1 °C. For biomolecular immobilization on the
gold sensing surface, the 1 mM MHDA ethanol solution was immobilized
on the gold film to form a self-assembled monolayer of the
corresponding thiolate (after approximately 6 h). The biosensor was
then soaked in the 2 mM EDC 5 mM NHS solution for 12 hours. Fig. 4
illustrates the variation of the resonance wavelength over the
course of the dynamic response process of the thiol-modified sensor.
After 212 minutes, Tris-HCl buffer was injected to wash away the
nonspecific bindings, causing the resonance wavelength shift to fall
to 5.7 nm. Although the optical measurement system and the proposed
device are quite sound, we found some problems in the practical use.
To excite SPs in a metallic film via subwavelength grating
enhancement, it is preferable to use highly collimated white light
as a continuum of in-plane wave vectors. However, a highly
collimated white light is hard to be narrowed down to the very small
sensing area ( 0.1×0.1 mm2) by the SEM lithography
system. Therefore, the incident white beam contains many wave
vectors that will excite secondary and tertiary SPs. This leads to
the reflectivity spectrum broadened to decrease the measurement
resolution. In addition, to develop the subwavelength grating
structure is with an expensive lithography process. However, as
designs are finalized, ordinary semiconductor manufacturing or new
nanoimprinting techniques will be employed allowing extremely low
cost devices to be fabricated.
In the summary, the CWSPR
biosensor with a subwavelength grating structure proposed in this
study provides a feasible and straightforward optical sensing
platform for performing biomolecular interaction analysis in real
time. The optical metrology system proposed in this study is more
straightforward than the Kretschmann ATR configuration and is less
sensitive to slight variations in the angle of the incident
light.
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